Low-Volume & Multi-Project Service
IHP offers research partners and customers access to its powerful SiGe:C BiCMOS technologies.
The technologies are especially suited for applications in the higher GHz bands (e.g. for wireless, broadband, radar). They provide integrated HBTs with cut-off frequencies of up to 300 GHz and integrated RF LDMOS devices with breakdown voltages of up to 22 V, including complementary devices.
The following SiGe:C BiCMOS technologies are available:
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SG25H1: |
A high-performance 0.25 µm technology with npn-HBTs up to fT/fmax= 180/220 GHz. |
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SG25H3: |
A 0.25 µm technology with a set of npn-HBTs ranging from a higher RF performance (fT/fmax= 110 GHz/180 GHz) to higher breakdown voltages up to 7 V. |
Additional pnp-HBTs with fT/fmax= 90 GHz/120 GHz are available. |
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SGB25V: |
A cost-effective technology with a set of npn-HBTs up to a breakdown voltage of 7 V. |
Additional integrated complementary RF LDMOS devices with breakdown voltages up to 22 V. |
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SG13S: |
A high-performance 0.13 µm BiCMOS with npn-HBTs up to fT / fmax= 250 / 300 GHz, with 3.3 V I/O CMOS and 1.2 V logic CMOS. |
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SG13B: |
Identical to SG13S but without 1.2 V logic CMOS. |
The backend offers 3 (SG13S: 5) thin and 2 thick metal layers (TM1: 2 μm, TM2: 3 μm).
There is a schedule for the MPW & Prototyping runs.
A cadence-based mixed signal design kit is available. For high frequency designs an analogue Design Kit in ADS can be used. IHP’s reusable blocks and IPs for wireless and broadband are offered to support designs.
Technical key-parameters of the technologies offered for
MPW & Prototyping:
High-Performance 0.25 µm SiGe:C BiCMOS (SG25H1)
Parameter |
npn1 |
npn2 |
Bipolar Section |
||
AE |
0.21 x 0.84 µm2 |
0.18 x 0.84 µm2 |
Peak fmax |
190 GHz |
220 GHz |
Peak fT |
190 GHz |
180 GHz |
BVCE0 |
1.9 V |
1.9 V |
BVCB0 |
4.5 V |
4.5 V |
VA |
40 V |
40 V |
ß |
200 |
200 |
0.25 µm SiGe:C BiCMOS with a set of npn-HBTs, ranging from high RF performance to higher breakdown voltages (SG25H3) PNP Module (SG25H3P)
Parameter |
High Performance 1 |
Medium Voltage |
High Voltage |
pnp |
Bipolar Section |
||||
AE |
0.22 x 0.84 µm2 |
0.22 x 2.24 µm2 |
0.22 x 2.24 µm2 |
0.21 x 0.84 µm2 |
Peak fmax |
180 GHz |
140 GHz |
80 GHz |
120 GHz |
Peak fT |
110 GHz |
45 GHz |
30 GHz |
90 GHz |
BVCE0 |
2.3 V |
5 V |
>7 V |
-2.5 V |
BVCB0 |
6.0 V |
15.5 V |
21.0 V |
-4.0 V |
VA |
30 V |
30 V |
30 V |
30 V |
ß |
150 |
150 |
150 |
100 |
0.25 µm SiGe:C BiCMOS with High-Voltage Devices (SGB25V)
Parameter |
High Performance |
Standard |
High Voltage |
Bipolar Section |
|||
AE |
0.42 x 0.84 µm2 |
0.42 x 0.84 µm2 |
0.42 x 0.84 µm2 |
Peak fmax |
95 GHz |
90 GHz |
70 GHz |
Peak fT |
75 GHz |
45 GHz |
25 GHz |
BVCE0 |
2.4 V |
4.0 V |
7.0 V |
BVCB0 |
>7 V |
>15 V |
>20 V |
VA |
>50 V |
>80 V |
>100 V |
ß |
190 |
190 |
190 |
GOD-Module in SGB25V
|
n-LDMOS |
p-LDMOS |
|
|
NLD3GD22C |
INLD3GD13A**** |
PLD3GD19B |
BVDSS* |
22 V |
13 V |
-19 V |
IDsat** |
150 µA/µm (VGS = 1.5 V) |
150 µA/µm (VGS = 1.5 V) |
-50 µA/µm (VGS = -1.5 V) |
Ileakage |
< 15 pA/µm (VDS = 16 V) |
< 10 pA/µm (VDS = 8V) |
> -10 pA/µm (VDS = -8 V) |
RON |
4 Ωmm |
4 Ωmm |
13 Ωmm |
Peak fmax*** |
48 GHz |
40 GHz |
27 GHz |
Peak fT*** |
18 GHz |
23 GHz |
9.5 GHz |
* : @50 pA/µm, **: @VDS = 5 V , *** : @VDS= 4 V, **** : substrate isolated |
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Preliminary target parameters extracted from first prototype preparations. The values given may differ from the final parameters. |
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CMOS and Passives of 0.25 µm and 0.13 µm Technologies
Parameter |
SG25H1/H3* |
SG13B/13S |
SG13S |
CMOS Section |
|||
Core Supply Voltage |
2.5 V |
3.3 V |
1.2 V |
nMOS Vth |
0.6 V |
0.65 V |
0.49 V |
nMOS IDsat |
540 µA/µm |
520 µA/µm |
500 µA/µm |
nMOS Ioff |
3 pA/µm |
10 pA/µm |
500 pA/µm |
pMOS Vth |
-0.56 V |
-0.61 V |
-0.42 V |
pMOS IDsat |
-230 µA/µm |
-220 µA/µm |
-210 µA/µm |
pMOS Ioff |
-3 pA/µm |
-10 pA/µm |
-500 pA/µm |
Passives |
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MIM Capacitor |
1 fF/µm2 |
1.5 fF/µm2 |
|
N+ Poly Resistor |
210 Ω/ |
- |
|
P+ Poly Resistor |
280 Ω/ |
335 Ω/ |
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High Poly Resistor |
1600 Ω/ |
750 Ω/ |
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Varactor Cmax/Cmin |
3 |
tbd. |
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Inductor Q@5.8 GHz (with PM2) |
20 (1 nH), 15 (1.8 nH) |
tbd. |
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Inductor Q@10 GHz (with TM2) |
23 (0.7 nH), 22 (1 nH) |
tbd. |
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* Parameters for SGB25V are similar.
0.13 μm SiGe:C BiCMOS SG13S, SG13B
Parameter |
npn13P |
npn13V |
Bipolar Section |
||
AE |
0.12 x 0.48 µm2 |
0.18 x 1.02 µm2 |
Peak fmax |
300 GHz |
120 GHz |
Peak fT |
250 GHz |
45 GHz |
BVCE0 |
1.7 V |
4 V |
BVCB0 |
5.5 V |
16 V |
ß |
500 |
450 |