
Technical Competencies of the Materials Research
Department
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• Identifying new materials systems for future Si-based nanotechnologies • Film growth of dielectrics, semiconductors, and metals by MBE and MO-CVD • Materials characterization including lab- as well as modern Synchrotron-based methods • Electric Characterization Techniques • Process step development for new materials • Theoretical ab-initio studies on the properties of dielectrics and semiconductors
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