Surface Acoustic Wave Devices for biosensoric and wireless communication applications
SAW Devices
SAW Devices
Objective
Surface acoustic wave devices (SAW) are commonly applied in modern commercial communication systems like radio-frequency (RF) front-end modules in cell phones, sensor devices for the detection of pressure and temperature or micro fluidic applications.
IHP`s Contribution
- Integration of CMOS compatible SAW devices into BiCMOS process flow.
- Design and simulation of SAW devices.
Funding
This project is funded by BMBF and ESF.
Project Partners
Paul-Drude-Institute Berlin
Fraunhofer Institute for Biomedical Engineering Potsdam
