IHP offers support for yield enhancement through failure mode analysis with state-of-the-art equipment, including AES, AFM, FIB, LST, SEM, SIMS, STM and TEM. Tester and equipment for RF measurements are available.
Failure Mode Analysis and Diagnostics, Test and RF-Measurements
Auger Electron Spectroscopy (PDF 139 kB)- Focused Ion Beam (PDF 148 kB)
- Hall Effect Measurement System (PDF 87 kB)
- Raman Spectroscopy (PDF 92 KB)
- Scanning Electron Microscopy (PDF 144 kB)
- Secondary Ion Mass Spectrometry (PDF 138 kB)
- Transmission Electron Microscopy (PDF 135 kB)
- Time-of-Flight Secondary Ion Mass Spectrometry (PDF 133 kB)
- X-Ray Photoelectron Spectroscopy (PDF 186 kB)
- X-Ray Diffraction (PDF 143 kB)
Overview of Analytical Methods
