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BMWI ZIM Project on In-situ Metrology development for semiconductor processing started

16.04.2015
The Leibniz Institutes WIAS Berlin and IHP in Frankfurt (Oder) started together with the company LayTec, located in Berlin, a newly granted BMWI ZIM project.

On 1st April 2015, the Leibniz Institutes WIAS Berlin (Weierstrass Institute for Applied Analysis and Stochastics) and IHP – Innovations for High Performance Microelectronics in Frankfurt (Oder) started together with the company LayTec, located in Berlin, a newly granted BMWI ZIM project.

 

In the consortium, the partners bring in a wide range of complementary expertise, namely LayTec focusses its product portfolio development on integrated metrology tools for advanced processes, IHP covers Silicon semiconductor micro and nano-processing as well as materials characterization and WIAS develops corresponding simulation algorithms for metrology.

 

The goal of the project is thus to optimize complex semiconductor processing by in-situ metrology tools to achieve cost effectiveness by reduced materials consumption in modern factories. The project thus fully corresponds to the mission of Leibniz Institutes to move from basic to applied research to address challenges in society; IHP and WIAS are members of the Leibniz networks “NANO” and “Mathematical Simulations” (the latter network is headed by WIAS).

 

The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.