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Integrated Lab-on-Chip Terahertz-Spectroscopy Platform in BiCMOS Technology


Goal of this project is the first-time demonstration of an ultra-broadband fully integrated microfluidic platform featuring terahertz (THz) spectroscopy sensors for future innovative Lab-on-Chip applications. The targeted platform will be realized in a single low-cost mass-manufacturable state-of-the-art SiGe BiCMOS technology. The proposed highly integrated demonstration platform will be applicable for studies of the real interaction between biological cells and electromagnetic fields on a single cell interaction level.

IHP's Contribution

The contribution of the IHP departments Circuit Design and Technology is the development and combination of integrated complex THz vector network analyzer sensor readout circuits in the 240-500 GHz frequency range realized in the front-end of line (FEOL) technology with THz sensing element implementations and novel microfluidic channel integration using additionally integrated trapping electrodes in the back-end of line (BEOL) process. 


This research is funded by the German Research Foundation (DFG) within the Priority Program SPP 1857/1 - ESSENCE – Electromagnetic Sensors for Life Sciences.

Project Partners

Other projects within the priority program.

Selected Publications

[1] M. Kaynak, M. Wietstruck, C. Baristiran Kaynak, S. Marschmeyer, P. Kulse, H. Silz, A. Krüger, R. Barth, K. Schmalz, and B. Tillack: “BiCMOS integrated microfluidic platform for Bio-MEMS applications”, in IEEE MTT-S Int. Microw. Symp. Dig., Tampa, FL, Jun. 2014, pp. 1-3.

[2] K. Schmalz, J. Borngräber, M. Kaynak, W. Winkler, J. Wessel, M. Neshat, S. Safavi-Naeini “A 120 GHz dielectric sensor in SiGe BiCMOS”, IEEE Microw. Wireless Compon. Lett., vol. 23, no. 1, pp. 46-48, Jan. 2013.

[3] B. Laemmle, K. Schmalz, J. C. Scheytt, R. Weigel, and D. Kissinger, “A 125-GHz permittivity sensor with read-out circuit in a 250-nm SiGe BiCMOS technology,” IEEE Trans. Microw. Theory Tech., vol. 61, no. 5, pp. 2185–2194, May 2013.

The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.