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MIMIRAWE

Millimeter Wave Radar for Space Application

Objective

  • System design and the realization of a near 100 GHz radar transceiver
  • The functionality will be realized by hetero-integrated circuits based on BiCMOS (IHP) and III-V bipolar (FBH) technology.
  • The MIMIRAWE project will use the advantages of SciFab, where the cooperation between FBH and IHP is used to realize high performance hetero-integrated MMICs.
  • Radiation hardness of SiGe and InP devices will be investigated in this project.

IHP's Contribution

  • Using IHPs SG25H1 technology as technical base for SiGe – InP heterogeneous integration by a Back-End-of-Line wafer bonding approach
  • The SG25H1 flow was specially adapted for wafer bonding.
     - Backside bond alignment marks
     - Planarization of TM2 level
     - 3” wafer sawing
  • Some dedicated SiGe circuit building blocks (e.g. a 42 GHz PLL-VCO) have to be designed, fabricated and tested and finally integrated into the system design.

Funding

BMWi

Project Partners

  • Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik FBH
  • Goethe-University Frankfurt (Main)
The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.